Preparation and relevant properties of amorphous AlBN dielectric films Article

Liu, Feng-feng, Li, Yu-xiong, Sui, Zhan-peng et al. (2020). Preparation and relevant properties of amorphous AlBN dielectric films . 48(6), 112-117. 10.11868/j.issn.1001-4381.2019.000323

cited authors

  • Liu, Feng-feng; Li, Yu-xiong; Sui, Zhan-peng; Cai, Yong; Zhang, Yong-hong; Jiang, Chun-ping

authors

publication date

  • June 20, 2020

keywords

  • AlBN
  • GAN MIS-HEMTS
  • Materials Science
  • Materials Science, Multidisciplinary
  • Science & Technology
  • Technology
  • amorphous film
  • pulsed laser deposition

publisher

  • BEIJING INST AERONAUTICAL MATERIALS-BIAM

start page

  • 112

end page

  • 117

volume

  • 48

issue

  • 6