Influence of Room-Temperature Oxidation on the Stability of Reactively Sputtered Tan Thin Films for Sheet Resistors Preprint

Zhang, Mingzhen, Wang, Yue, Song, Shangzhi et al. Influence of Room-Temperature Oxidation on the Stability of Reactively Sputtered Tan Thin Films for Sheet Resistors . 10.2139/ssrn.4586215

cited authors

  • Zhang, Mingzhen; Wang, Yue; Song, Shangzhi; Guo, Ruiqiang; Zhang, Wenbin; Li, Chengming; Wei, Junjun; Yang, Ronggui; Jiang, Puqing

authors

keywords

  • 40 Engineering
  • 4016 Materials Engineering

Digital Object Identifier (DOI)