Influence of Room-Temperature Oxidation on the Stability of Reactively Sputtered Tan Thin Films for Sheet Resistors Preprint

cited authors

  • Zhang, Mingzhen; Wang, Yue; Song, Shangzhi; Guo, Ruiqiang; Zhang, Wenbin; Li, Chengming; Wei, Junjun; Yang, Ronggui; Jiang, Puqing

authors

publication date

  • January 1, 2023

webpage

Digital Object Identifier (DOI)