Structure and electrical properties of pure and yttrium-doped HfO2 films by chemical solution deposition through layer by layer crystallization process
Article
Liang, Hailong, Xu, Jin, Zhou, Dayu et al. (2017). Structure and electrical properties of pure and yttrium-doped HfO2 films by chemical solution deposition through layer by layer crystallization process
. MATERIALS & DESIGN, 120 376-381. 10.1016/j.matdes.2017.02.019
Liang, Hailong, Xu, Jin, Zhou, Dayu et al. (2017). Structure and electrical properties of pure and yttrium-doped HfO2 films by chemical solution deposition through layer by layer crystallization process
. MATERIALS & DESIGN, 120 376-381. 10.1016/j.matdes.2017.02.019