Low temperature ECR-CVD of (Ba,Sr)TiO3 films Conference

Alluri, P, Tang, D, Dey, SK. (1997). Low temperature ECR-CVD of (Ba,Sr)TiO3 films . INTEGRATED FERROELECTRICS, 18(1-4), 145-154. 10.1080/10584589708221695

cited authors

  • Alluri, P; Tang, D; Dey, SK

sustainable development goals

authors

date/time interval

  • March 2, 1997 -

publication date

  • January 1, 1997

published in

keywords

  • (Ba,Sr)TiO3
  • CVD
  • ECR
  • Engineering
  • Engineering, Electrical & Electronic
  • MOCVD
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • SrTiO3
  • THIN-FILMS
  • Technology
  • direct liquid injection
  • phase stability diagram

Location

  • NM, SANTA FE

Digital Object Identifier (DOI)

Conference

  • 9th International Symposium on Integrated Ferroelectrics

publisher

  • GORDON BREACH SCI PUBL LTD

start page

  • 145

end page

  • 154

volume

  • 18

issue

  • 1-4