ECR-MOCVD of the Ba-Sr-Ti-O system below 400°C -: Part I:: Processing Article

Alluri, P, Majhi, P, Tang, D et al. (1998). ECR-MOCVD of the Ba-Sr-Ti-O system below 400°C -: Part I:: Processing . INTEGRATED FERROELECTRICS, 21(1-4), 305-318. 10.1080/10584589808202072

cited authors

  • Alluri, P; Majhi, P; Tang, D; Dey, SK

sustainable development goals

authors

publication date

  • January 1, 1998

published in

keywords

  • (Ba,Sr)TiO3
  • CVD
  • ECR
  • Engineering
  • Engineering, Electrical & Electronic
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • SrTiO3
  • THIN-FILMS
  • Technology
  • design of experiments
  • direct liquid injection

Digital Object Identifier (DOI)

publisher

  • GORDON BREACH SCI PUBL LTD

start page

  • 305

end page

  • 318

volume

  • 21

issue

  • 1-4