ECR-MOCVD of the Ba-Sr-Ti-O system below 400°C -: Part I:: Processing Article

(1998). ECR-MOCVD of the Ba-Sr-Ti-O system below 400°C -: Part I:: Processing . Integrated Ferroelectrics, 21(1-4), -318.

sustainable development goals

authors

publication date

  • January 1, 1998

published in

keywords

  • ECR
  • Engineering
  • Engineering, Electrical & Electronic
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • SrTiO3
  • THIN-FILMS
  • Technology
  • design of experiments
  • direct liquid injection

end page

  • 318

volume

  • 21

issue

  • 1-4