Barium strontium titanate capacitors for embedded DRAM Conference

Zurcher, P, Tracy, CJ, Jones, RE et al. (1999). Barium strontium titanate capacitors for embedded DRAM . 541 11-22.

cited authors

  • Zurcher, P; Tracy, CJ; Jones, RE; Alluri, P; Chu, PY; Jiang, B; Kim, M; Melnick, BM; Raymond, MV; Roberts, D; Remmel, TP; Tsai, TL; White, BE; Zafar, S; Gillespie, SJ

sustainable development goals

authors

date/time interval

  • November 30, 1998 -

publication date

  • January 1, 1999

keywords

  • (BA,SR)TIO3 THIN-FILMS
  • CVD
  • DC ELECTRICAL DEGRADATION
  • ELECTRODES
  • IR
  • MECHANISM
  • Materials Science
  • Materials Science, Characterization & Testing
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • PEROVSKITE-TYPE TITANATES
  • Science & Technology
  • TECHNOLOGY
  • TEMPERATURE
  • Technology

Location

  • MA, BOSTON

International Standard Book Number (ISBN) 10

Conference

  • Symposium on Ferroelectric Thin Films VII

publisher

  • MATERIALS RESEARCH SOC

start page

  • 11

end page

  • 22

volume

  • 541