Metallorganic chemical vapor deposition of Ir films with iridium acetylacetonate and carbonyl precursors Conference

Sun, YM, Endle, J, Smith, K et al. (1999). Metallorganic chemical vapor deposition of Ir films with iridium acetylacetonate and carbonyl precursors . 541 101-106.

cited authors

  • Sun, YM; Endle, J; Smith, K; Ekerdt, JG; Hance, RL; Alluri, P; White, JM

authors

date/time interval

  • November 30, 1998 -

publication date

  • January 1, 1999

keywords

  • ELECTRODES
  • Materials Science
  • Materials Science, Characterization & Testing
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Science & Technology
  • Technology

Location

  • MA, BOSTON

International Standard Book Number (ISBN) 10

Conference

  • Symposium on Ferroelectric Thin Films VII

publisher

  • MATERIALS RESEARCH SOCIETY

start page

  • 101

end page

  • 106

volume

  • 541