Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganic chemical vapor deposition Article

Gao, Y, He, S, Alluri, P et al. (2000). Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganic chemical vapor deposition . JOURNAL OF APPLIED PHYSICS, 87(1), 124-132. 10.1063/1.371833

cited authors

  • Gao, Y; He, S; Alluri, P; Engelhard, M; Lea, AS; Finder, J; Melnick, B; Hance, RL

sustainable development goals

authors

publication date

  • January 1, 2000

published in

keywords

  • DRAM
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • THIN-FILMS

Digital Object Identifier (DOI)

publisher

  • AMER INST PHYSICS

start page

  • 124

end page

  • 132

volume

  • 87

issue

  • 1