Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films Article

Gao, Y, Perkins, CL, He, S et al. (2000). Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films . JOURNAL OF APPLIED PHYSICS, 87(10), 7430-7437. 10.1063/1.373005

Open Access

cited authors

  • Gao, Y; Perkins, CL; He, S; Alluri, P; Tran, T; Thevuthasan, S; Henderson, MA

sustainable development goals

authors

publication date

  • May 15, 2000

published in

keywords

  • (BA
  • BASRTIO3
  • DRAM
  • ELECTRICAL-PROPERTIES
  • MOCVD
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SR)TIO3 FILMS
  • Science & Technology

Digital Object Identifier (DOI)

publisher

  • AMER INST PHYSICS

start page

  • 7430

end page

  • 7437

volume

  • 87

issue

  • 10