Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors
Article
Zhang, Mingzhen, Wang, Yue, Song, Shangzhi et al. (2024). Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors
. 46 10.1016/j.surfin.2024.104088
Zhang, Mingzhen, Wang, Yue, Song, Shangzhi et al. (2024). Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors
. 46 10.1016/j.surfin.2024.104088