Low Temperature Hermetic Packaging Scheme for Complex MOEMS Devices with Lateral Feedthroughs Article

Agarwal, Rahul, Samson, Scott, Wang, Weidong et al. (2007). Low Temperature Hermetic Packaging Scheme for Complex MOEMS Devices with Lateral Feedthroughs . MA2007-02(34), 1532-1532. 10.1149/ma2007-02/34/1532

cited authors

  • Agarwal, Rahul; Samson, Scott; Wang, Weidong; Bhansali, S

authors

publication date

  • September 28, 2007

Digital Object Identifier (DOI)

publisher

  • The Electrochemical Society

start page

  • 1532

end page

  • 1532

volume

  • MA2007-02

issue

  • 34