An empirical study of boss/seat materials and geometries for ultra low-leakage MEMS micro-valves
Conference
Lynch, BA, Jamieson, BG, Roman, PA et al. (2005). An empirical study of boss/seat materials and geometries for ultra low-leakage MEMS micro-valves
. 7 MEMS 263-267. 10.1115/IMECE2005-81082
Lynch, BA, Jamieson, BG, Roman, PA et al. (2005). An empirical study of boss/seat materials and geometries for ultra low-leakage MEMS micro-valves
. 7 MEMS 263-267. 10.1115/IMECE2005-81082