Electron Beam Lithography (EBL) Book Chapter

Pala, N, Karabiyik, M. (2012). Electron Beam Lithography (EBL) . 718-740. 10.1007/978-90-481-9751-4_344

cited authors

  • Pala, N; Karabiyik, M

authors

publication date

  • January 1, 2012

Digital Object Identifier (DOI)

start page

  • 718

end page

  • 740