Electron Beam Lithography (EBL) Book Chapter

Pala, Nezih, Karabiyik, Mustafa. (2012). Electron Beam Lithography (EBL) . 718-740. 10.1007/978-90-481-9751-4_344

cited authors

  • Pala, Nezih; Karabiyik, Mustafa

authors

publication date

  • January 1, 2012

Digital Object Identifier (DOI)

publisher

  • Springer Nature

start page

  • 718

end page

  • 740