Electron Beam Lithography (EBL) Book Chapter

Pala, Nezih, Karabiyik, Mustafa. (2016). Electron Beam Lithography (EBL) . 1033-1057. 10.1007/978-94-017-9780-1_344

cited authors

  • Pala, Nezih; Karabiyik, Mustafa

authors

publication date

  • January 1, 2016

Digital Object Identifier (DOI)

publisher

  • Springer Nature

start page

  • 1033

end page

  • 1057