Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors Conference

Gardner, DS, Holzwarth, CW, Liu, Y et al. (2014). Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors . 2014 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)

Industry Collaboration International Collaboration

cited authors

  • Gardner, DS; Holzwarth, CW; Liu, Y; Clendenning, SB; Jin, W; Moon, BK; Pint, C; Chen, Z; Hannah, E; Chen, R; Wang, CP; Chen, C; Makila, E; Gustafson, JL

authors

date/time interval

  • December 15, 2014 -

publication date

  • January 1, 2014

published in

keywords

  • ATOMIC LAYER DEPOSITION
  • Computer Science
  • Computer Science, Theory & Methods
  • Engineering
  • Engineering, Electrical & Electronic
  • SURFACE
  • Science & Technology
  • Technology

Location

  • CA, San Francisco

Conference

  • 60th Annual IEEE International Electron Devices Meeting (IEDM)

publisher

  • IEEE