Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media
Article
Park, BY, Taherabadi, L, Wang, CL et al. (2005). Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media
. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(12), J136-J143. 10.1149/1.2116707
Park, BY, Taherabadi, L, Wang, CL et al. (2005). Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media
. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(12), J136-J143. 10.1149/1.2116707