Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media Article

Park, BY, Taherabadi, L, Wang, CL et al. (2005). Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media . JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(12), J136-J143. 10.1149/1.2116707

keywords

  • BENZENE
  • C-MEMS
  • CHEMICAL-VAPOR-DEPOSITION
  • CHEMISTRY
  • ELECTROCHEMICAL APPLICATIONS
  • Electrochemistry
  • FABRICATION
  • KINETICS
  • LOW-TEMPERATURE REGIME
  • Materials Science
  • Materials Science, Coatings & Films
  • PYROCARBON DEPOSITION
  • PYROLYTIC CARBON
  • Physical Sciences
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELECTROCHEMICAL SOC INC

start page

  • J136

end page

  • J143

volume

  • 152

issue

  • 12