Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media Article

Park, BY, Taherabadi, L, Wang, CL et al. (2005). Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media . Journal of the Electrochemical Society, 152(12), J136-J143. 10.1149/1.2116707

cited authors

  • Park, BY; Taherabadi, L; Wang, CL; Zoval, J; Madou, MJ

publication date

  • January 1, 2005

published in

keywords

  • BENZENE
  • C-MEMS
  • CHEMICAL-VAPOR-DEPOSITION
  • CHEMISTRY
  • ELECTROCHEMICAL APPLICATIONS
  • Electrochemistry
  • FABRICATION
  • KINETICS
  • LOW-TEMPERATURE REGIME
  • Materials Science
  • Materials Science, Coatings & Films
  • PYROCARBON DEPOSITION
  • PYROLYTIC CARBON
  • Physical Sciences
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • J136

end page

  • J143

volume

  • 152

issue

  • 12