Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis Article

Malladi, Kartikeya, Wang, Chunlei, Madou, Marc. (2006). Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis . CARBON, 44(13), 2602-2607. 10.1016/j.carbon.2006.04.039

keywords

  • C-MEMS
  • Chemistry
  • Chemistry, Physical
  • Materials Science
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Science & Technology
  • Technology
  • microstructure
  • plasma sputtering
  • pyrolysis
  • pyrolytic carbon
  • scanning electron microscope

Digital Object Identifier (DOI)

publisher

  • PERGAMON-ELSEVIER SCIENCE LTD

start page

  • 2602

end page

  • 2607

volume

  • 44

issue

  • 13