Skin effect aggregated heating in RF MEMS suspended structures Conference

Chow, LLW, Wang, Z, Jensen, BD et al. (2005). Skin effect aggregated heating in RF MEMS suspended structures . IEEE MTT-S International Microwave Symposium Digest, 2143-2146. 10.1109/MWSYM.2005.1517173

Open Access

cited authors

  • Chow, LLW; Wang, Z; Jensen, BD; Saitou, K; Volakis, JL; Kurabayashi, K

authors

date/time interval

  • June 11, 2005 -

publication date

  • January 1, 2005

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Science & Technology
  • Technology
  • Telecommunications
  • coplanar waveguides
  • failure analysis
  • microelectromechanical devices
  • skin effect
  • transmission lines

Location

  • CA, Long Beach

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

Conference

  • IEEE MTT-S International Microwave Symposium

publisher

  • IEEE

start page

  • 2143

end page

  • 2146