Fabrication of Dense Non-Circular Nanomagnetic Device Arrays Using Self-Limiting Low-Energy Glow-Discharge Processing Article

Zheng, Zhen, Chang, Long, Nekrashevich, Ivan et al. (2013). Fabrication of Dense Non-Circular Nanomagnetic Device Arrays Using Self-Limiting Low-Energy Glow-Discharge Processing . PLOS ONE, 8(8), 10.1371/journal.pone.0073083

Open Access

cited authors

  • Zheng, Zhen; Chang, Long; Nekrashevich, Ivan; Ruchhoeft, Paul; Khizroev, Sakhrat; Litvinov, Dmitri

publication date

  • August 14, 2013

published in

keywords

  • BLOCK-COPOLYMER
  • ELECTRON-BEAM LITHOGRAPHY
  • ION
  • Multidisciplinary Sciences
  • PROXIMITY EFFECT CORRECTION
  • Science & Technology
  • Science & Technology - Other Topics

Digital Object Identifier (DOI)

publisher

  • PUBLIC LIBRARY SCIENCE

volume

  • 8

issue

  • 8