Fabrication and test of a filling station for micro/miniature devices Conference

Cao, Y, Gao, M, Pinilla, E. (1997). Fabrication and test of a filling station for micro/miniature devices . 1509-1513. 10.1109/IECEC.1997.661993

keywords

  • Electrochemistry
  • Engineering
  • Engineering, Aerospace
  • Engineering, Chemical
  • Engineering, Electrical & Electronic
  • Physical Sciences
  • Science & Technology
  • Technology

Location

  • HONOLULU, HI

Digital Object Identifier (DOI)

International Standard Book Number (ISBN) 10

Conference

  • 32nd Intersociety Energy Conversion Engineering Conference (IECEC-97)

publisher

  • AMER INST CHEMICAL ENGINEERS

start page

  • 1509

end page

  • 1513