Evaluation of silicon nitride as a diffusion barrier for Gd-Si-Ge films on silicon Article

Sambandam, SN, Bethala, B, Sood, DK et al. (2005). Evaluation of silicon nitride as a diffusion barrier for Gd-Si-Ge films on silicon . SURFACE & COATINGS TECHNOLOGY, 200(5-6), 1335-1340. 10.1016/j.surfcoat.2005.08.130

International Collaboration

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology
  • diffusion barrier
  • magnetocaloric
  • sputtering
  • thin films

Location

  • San Diego, CA

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 1335

end page

  • 1340

volume

  • 200

issue

  • 5-6