Modeling multilayered MEMS-based micro-fluldic systems Article

Bhansali, S, Benjamin, H, Upadhyay, V et al. (2004). Modeling multilayered MEMS-based micro-fluldic systems . JOM, 56(3), 57-61. 10.1007/s11837-004-0036-3

cited authors

  • Bhansali, S; Benjamin, H; Upadhyay, V; Okulan, N; Oh, KW; Henderson, HT; Ahn, CH

sustainable development goals

publication date

  • March 1, 2004

published in

  • JOM  Journal

keywords

  • Materials Science
  • Materials Science, Multidisciplinary
  • Metallurgy & Metallurgical Engineering
  • Mineralogy
  • Mining & Mineral Processing
  • Physical Sciences
  • Science & Technology
  • Technology

Location

  • San Diego, CA

Digital Object Identifier (DOI)

publisher

  • SPRINGER

start page

  • 57

end page

  • 61

volume

  • 56

issue

  • 3