A low loss flexural plate wave (FPW) device through enhanced properties of sol-gel PZT (52/48) thin film and stable TiN-Pt bottom electrode Article

Sekhar, Praveen Kumar, Akella, Sriram, Bhansali, Shekhar. (2006). A low loss flexural plate wave (FPW) device through enhanced properties of sol-gel PZT (52/48) thin film and stable TiN-Pt bottom electrode . Sensors and Actuators, A: Physical, 132(1), 376-384. 10.1016/j.sna.2006.07.020

cited authors

  • Sekhar, Praveen Kumar; Akella, Sriram; Bhansali, Shekhar

sustainable development goals

authors

publication date

  • November 8, 2006

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • FERROELECTRIC PROPERTIES
  • FPW
  • IDT
  • INTEGRATION
  • Instruments & Instrumentation
  • LEAD-ZIRCONATE-TITANATE
  • MICROSTRUCTURE
  • ORIENTATION
  • PZT
  • SILICON
  • Science & Technology
  • Technology
  • annealing
  • dielectric loss
  • perovskite
  • piezoelectric
  • pyrolysis

Digital Object Identifier (DOI)

start page

  • 376

end page

  • 384

volume

  • 132

issue

  • 1