Studies on sputtering process of multicomponent Zr-Ti-Cu-Ni-Be alloy thin films Article

Sambandam, SN, Bhansali, S, Bhethanabotla, VR et al. (2006). Studies on sputtering process of multicomponent Zr-Ti-Cu-Ni-Be alloy thin films . 80(5), 406-414. 10.1016/j.vacuum.2005.07.037

International Collaboration

keywords

  • COATINGS
  • DEPOSITION
  • Materials Science
  • Materials Science, Multidisciplinary
  • Monte-Carlo simulations
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SIMULATION
  • Science & Technology
  • Technology
  • multicomponent thin films
  • sputtering

Digital Object Identifier (DOI)

publisher

  • PERGAMON-ELSEVIER SCIENCE LTD

start page

  • 406

end page

  • 414

volume

  • 80

issue

  • 5