Design and simulation of a piezoresistive MEMS pressure sensor for marine applications

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Design and simulation of a piezoresistive MEMS pressure sensor for marine applications Conference

Aravamudhan, S, Bhansali, S. (2004). Design and simulation of a piezoresistive MEMS pressure sensor for marine applications . 347-355.

cited authors

Aravamudhan, S; Bhansali, S

authors

Bhansali, Shekhar

date/time interval

March 14, 2004 -

publication date

January 1, 2004

webpage

https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000221357100034&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=e451fd656366bf1ec5554941920a9ccb

keywords

Engineering
Engineering, Manufacturing
Materials Science
Materials Science, Multidisciplinary
Mechanics
SILICON
Science & Technology
Technology
diaphragm
piezoresistor
pressure sensor

Location

Charlotte, NC

International Standard Book Number (ISBN) 10

0-87339-570-0

Conference

Symposium on CFD Modeling and Simulation of Engineering Process/Multi-Scale Phenomena in Materials Processing Conference

publisher

MINERALS, METALS & MATERIALS SOC

start page

347

end page

355