Improved mems thermal actuator design by modification of hot-arm geometry Conference

Upadhyay, V, Samson, S, Wang, WD et al. (2004). Improved mems thermal actuator design by modification of hot-arm geometry . 381-387.

cited authors

  • Upadhyay, V; Samson, S; Wang, WD; Bhansali, S

authors

date/time interval

  • March 14, 2004 -

publication date

  • January 1, 2004

webpage

keywords

  • ARRAYS
  • Engineering
  • Engineering, Manufacturing
  • MEMS.
  • Materials Science
  • Materials Science, Multidisciplinary
  • Mechanics
  • OPTIMIZATION
  • Science & Technology
  • Technology
  • microactuator
  • plastic deformation
  • thermal actuator

Location

  • Charlotte, NC

International Standard Book Number (ISBN) 10

Conference

  • Symposium on CFD Modeling and Simulation of Engineering Process/Multi-Scale Phenomena in Materials Processing Conference

publisher

  • MINERALS, METALS & MATERIALS SOC

start page

  • 381

end page

  • 387