Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets Article

Ohta, A, Bhansali, S, Kishimoto, I et al. (2000). Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets . SENSORS AND ACTUATORS A-PHYSICAL, 86(3), 165-170. 10.1016/S0924-4247(00)00449-0

keywords

  • ACTUATORS
  • DEPOSITION
  • Engineering
  • Engineering, Electrical & Electronic
  • Instruments & Instrumentation
  • MEMS
  • MICROACTUATORS
  • Science & Technology
  • THIN-FILM
  • Technology
  • TiNi
  • phase transformation
  • shape memory alloy

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 165

end page

  • 170

volume

  • 86

issue

  • 3