Ion implantation for nucleation of electroless Ni films on <100> Si Article

Bhansali, S, Sood, DK, Evans, PJ et al. (1997). Ion implantation for nucleation of electroless Ni films on <100> Si . SENSORS AND ACTUATORS A-PHYSICAL, 62(1-3), 705-710. 10.1016/S0924-4247(97)01622-1

International Collaboration

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • GROWTH
  • Instruments & Instrumentation
  • POLYIMIDE
  • Science & Technology
  • Technology
  • electroless nickel films
  • ion implantation
  • silicon

Location

  • LOUVAIN, BELGIUM

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA LAUSANNE

start page

  • 705

end page

  • 710

volume

  • 62

issue

  • 1-3