Electrochemically Activated C-MEMS Electrodes for On-Chip Micro-Supercapacitors Patent

Electrochemically Activated C-MEMS Electrodes for On-Chip Micro-Supercapacitors .

Inventor

date issued

  • February 13, 2018

webpage

local award ID

  • IP-1010

patent number

  • US/9,892,869